PLAINVIEW, N.Y.--(BUSINESS WIRE)--April 29, 2008--Veeco
Instruments Inc. (Nasdaq: VECO), announced today that its new
InSight(TM) 3D Automated Atomic Force Microscope (3DAFM) Platform has
been accepted by a key global semiconductor customer. The InSight is
the only metrology system available with the accuracy and precision
required for non-destructive, high-resolution three-dimensional (3D)
measurements of critical 45nm and 32nm semiconductor features, coupled
with the speed to qualify as a true fab tool. Veeco's InSight 3DAFM
was designed specifically to address Critical Dimension (CD), depth
and chemical mechanical planarization (CMP) metrology in a production
environment.
Mark Munch, Ph.D., Executive Vice President, Veeco Metrology,
commented, "We are pleased that our first beta customer, one that is
known as a technology innovator, has signed off on the tool, which has
been running in a production environment for three months. With three
times the throughput (30 wafers per hour) and two times the
measurement accuracy and precision of our previous AFMs, Veeco's
InSight represents an entirely new approach for semiconductor 3D
metrology."
"InSight is the only tool on the market today providing in-line,
accurate, non-destructive 3D information to drive shorter process
development and manufacturing ramp times, thereby improving our
customers' cost of ownership and decreasing their manufacturing risk,"
added Paul Clayton, Vice President, Veeco's Auto AFM Business Unit.
"Traditional in-line metrology techniques have been seriously limited
in their ability to measure CD at 45nm and below."
About InSight 3DAFM
The InSight 3DAFM features an innovative metrology platform
designed to meet the stringent requirements of 45 and 32nm
semiconductor metrology applications, such as CD, sidewall angle and
line width roughness on critical layers, including Gate and FinFet
structures. The system contains a new high-precision X-Y stage with
improved accuracy and a unique pattern recognition system with
high-precision laser auto-focus capability. In addition, new AFM
control techniques and proprietary probe designs enable improved
precision, lower cost per measurement site and smaller feature
measurement. Finally, system reliability is significantly enhanced to
meet the demands of 45nm production-based metrology. Further
information on InSight can be found at www.veeco.com/insight3dafm.
About Veeco
Veeco Instruments Inc. manufactures enabling solutions for
customers in the HB-LED, solar, data storage, semiconductor,
scientific research and industrial markets. We have leading technology
positions in our three businesses: LED & Solar Process Equipment, Data
Storage Process Equipment, and Metrology Instruments. Veeco's
manufacturing and engineering facilities are located in New York, New
Jersey, California, Colorado, Arizona and Minnesota. Global sales and
service offices are located throughout the U.S., Europe, Japan and
APAC. http://www.veeco.com/
To the extent that this news release discusses expectations or
otherwise makes statements about the future, such statements are
forward-looking and are subject to a number of risks and uncertainties
that could cause actual results to differ materially from the
statements made. These factors include the risks discussed in the
Business Description and Management's Discussion and Analysis sections
of Veeco's Annual Report on Form 10-K for the year ended December 31,
2007 and in our subsequent quarterly reports on Form 10-Q, current
reports on Form 8-K and press releases. Veeco does not undertake any
obligation to update any forward-looking statements to reflect future
events or circumstances after the date of such statements.
CONTACT: Veeco Instruments Inc.
Investors:
Deb Wasser, 1-516-677-0200 x 1472
SVP Investor Relations
or
Trade Media:
Fran Brennen, 1-516-677-0200 x1222
Senior Director of Marcom
SOURCE: Veeco Instruments Inc.